{"id":6373,"date":"2023-05-15T13:33:31","date_gmt":"2023-05-15T05:33:31","guid":{"rendered":"https:\/\/vcai.cn\/?p=6373"},"modified":"2023-05-15T13:33:32","modified_gmt":"2023-05-15T05:33:32","slug":"zhuti-20230515-namiyayin","status":"publish","type":"post","link":"https:\/\/vcai.cn\/index.php\/zhuti-20230515-namiyayin\/","title":{"rendered":"\u8fd9\u9879\u6280\u672f\u8fce\u6765\u91cd\u5927\u8fdb\u5c55\uff0c\u6709\u671b\u90e8\u5206\u66ff\u4ee3EUV\u5149\u523b"},"content":{"rendered":"\n<p>\u8bc1\u5238\u65f6\u62a5\u62a5\u9053\uff0cSK\u6d77\u529b\u58eb\u4ece\u4f73\u80fd\u5f15\u8fdb\u7eb3\u7c73\u538b\u5370\u8bbe\u5907\uff0c\u8ba1\u5212\u57282025\u5e74\u5de6\u53f3\u4f7f\u7528\u8be5\u8bbe\u5907\u5f00\u59cb\u91cf\u4ea73D NAND\u95ea\u5b58\uff0c\u76ee\u524d\u6d4b\u8bd5\u7ed3\u679c\u826f\u597d\u3002\u53e6\u4e00\u5b58\u50a8\u5de8\u5934\u4e09\u661f\u4e3a\u4e86\u89e3\u51b3\u5f15\u8fdb\u591a\u56fe\u6848\u5de5\u827a\u5bfc\u81f4\u7684\u6210\u672c\u4e0a\u5347\u95ee\u9898\uff0c\u9664\u5bfc\u5165EUV\u5149\u523b\u673a\u4e4b\u5916\u8fd8\u5f00\u53d1\u4e86\u5305\u62ec\u7eb3\u7c73\u538b\u5370\u6280\u672f\u5728\u5185\u76843-4\u79cd\u89e3\u51b3\u65b9\u6848\u3002\u6b64\u5916\uff0c\u94e0\u4fa0\u3001\u4e1c\u829d\u7b49\u65e5\u5b58\u50a8\u5927\u5382\u5728\u7eb3\u7c73\u538b\u5370\u6280\u672f\u9886\u57df\u5df2\u6709\u76f8\u5173\u5e03\u5c40\u3002<\/p>\n\n\n\n<div id=\"ez-toc-container\" class=\"ez-toc-v2_0_82_2 counter-hierarchy ez-toc-counter ez-toc-grey ez-toc-container-direction\">\n<div class=\"ez-toc-title-container\">\n<p class=\"ez-toc-title\" style=\"cursor:inherit\">Table of Contents<\/p>\n<span class=\"ez-toc-title-toggle\"><a href=\"#\" class=\"ez-toc-pull-right ez-toc-btn ez-toc-btn-xs ez-toc-btn-default ez-toc-toggle\" aria-label=\"Toggle Table of Content\"><span class=\"ez-toc-js-icon-con\"><i class=\"ez-toc-toggle-el\"><\/i><\/span><\/a><\/span><\/div>\n<nav><ul class='ez-toc-list ez-toc-list-level-1 ' ><li class='ez-toc-page-1 ez-toc-heading-level-3'><a class=\"ez-toc-link ez-toc-heading-1\" href=\"https:\/\/vcai.cn\/index.php\/zhuti-20230515-namiyayin\/#25E425B8258025E32580258125E725BA25B325E725B125B325E525BE25AE25E5258D25B025E6259825AF25E425BB258025E425B92588\" >\u4e00\u3001\u7eb3\u7c73\u5fae\u5370\u662f\u4ec0\u4e48<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-3'><a class=\"ez-toc-link ez-toc-heading-2\" href=\"https:\/\/vcai.cn\/index.php\/zhuti-20230515-namiyayin\/#25E425BA258C25E32580258125E725BA25B325E725B125B325E5258E258B25E5258D25B025E425B8258EEUV25E52585258925E5258825BB25E7259A258425E625AF259425E825BE2583\" >\u4e8c\u3001\u7eb3\u7c73\u538b\u5370\u4e0eEUV\u5149\u523b\u7684\u6bd4\u8f83<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-3'><a class=\"ez-toc-link ez-toc-heading-3\" href=\"https:\/\/vcai.cn\/index.php\/zhuti-20230515-namiyayin\/#25E425B8258925E32580258125E725BA25B325E725B125B325E5258E258B25E5258D25B025E425BA25A725E425B8259A25E9259325BE\" >\u4e09\u3001\u7eb3\u7c73\u538b\u5370\u4ea7\u4e1a\u94fe<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-3'><a class=\"ez-toc-link ez-toc-heading-4\" href=\"https:\/\/vcai.cn\/index.php\/zhuti-20230515-namiyayin\/#25E5259B259B25E32580258125E725BA25B325E725B125B325E5258E258B25E5258D25B025E6258A258025E6259C25AF25E5259C25A825E5258525B625E425BB259625E925A2258625E5259F259F25E7259A258425E525BA259425E7259425A8\" >\u56db\u3001\u7eb3\u7c73\u538b\u5370\u6280\u672f\u5728\u5176\u4ed6\u9886\u57df\u7684\u5e94\u7528<\/a><\/li><\/ul><\/nav><\/div>\n<h3 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"25E425B8258025E32580258125E725BA25B325E725B125B325E525BE25AE25E5258D25B025E6259825AF25E425BB258025E425B92588\"><\/span>\u4e00\u3001\u7eb3\u7c73\u5fae\u5370\u662f\u4ec0\u4e48<span class=\"ez-toc-section-end\"><\/span><\/h3>\n\n\n\n<p>\u7eb3\u7c73\u538b\u5370\u6280\u672f\uff08NIL\uff09\uff0c\u662f\u4e00\u79cd\u65b0\u578b\u7684\u5fae\u7eb3\u52a0\u5de5\u6280\u672f\u3002\u8be5\u6280\u672f\u5c06\u8bbe\u8ba1\u5e76\u5236\u4f5c\u5728\u6a21\u677f\u4e0a\u7684\u5fae\u5c0f\u56fe\u5f62\uff0c\u901a\u8fc7\u538b\u5370\u7b49\u6280\u672f\u8f6c\u79fb\u5230\u6d82\u6709\u9ad8\u5206\u5b50\u6750\u6599\u7684\u7845\u57fa\u677f\u4e0a\uff0c\u53ef\u5b9e\u73b0\u7eb3\u7c73\u7ea7\u7ebf\u5bbd\u7684\u56fe\u5f62\uff0c\u5176\u52a0\u5de5\u5206\u8fa8\u7387\u53ea\u4e0e\u6a21\u7248\u56fe\u6848\u5c3a\u5bf8\u6709\u5173\uff0c\u800c\u4e0d\u53d7\u5149\u523b\u6700\u77ed\u66dd\u5149\u6ce2\u957f\u7684\u7269\u7406\u9650\u5236\u3002<\/p>\n\n\n\n<p>\u6839\u636e\u538b\u5370\u65b9\u6cd5\u7684\u4e0d\u540c\uff0cNIL\u4e3b\u8981\u53ef\u5206\u4e3a\u70ed\u538b\u5370\uff08Hot embossing\uff09\u3001\u7d2b\u5916\u56fa\u5316\u538b\u5370\uff08UV-NIL\uff09\u548c\u5fae\u63a5\u89e6\u5370\u5237\uff08Micro contact printing cup\uff09\u4e09\u79cd\u5149\u523b\u6280\u672f\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"497\" src=\"https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/2023051502000444-1024x497.png\" alt=\"\" class=\"wp-image-6377\" srcset=\"https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/2023051502000444-1024x497.png 1024w, https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/2023051502000444-300x146.png 300w, https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/2023051502000444-768x373.png 768w, https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/2023051502000444.png 1268w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"25E425BA258C25E32580258125E725BA25B325E725B125B325E5258E258B25E5258D25B025E425B8258EEUV25E52585258925E5258825BB25E7259A258425E625AF259425E825BE2583\"><\/span>\u4e8c\u3001\u7eb3\u7c73\u538b\u5370\u4e0eEUV\u5149\u523b\u7684\u6bd4\u8f83<span class=\"ez-toc-section-end\"><\/span><\/h3>\n\n\n\n<p>\u5728\u82af\u7247\u9886\u57df\uff0c\u7eb3\u7c73\u538b\u5370\u5c1a\u5904\u4e8e\u4ea7\u4e1a\u5316\u521d\u671f\u9636\u6bb5\uff0c\u5728\u826f\u54c1\u63a7\u5236\u3001\u6a21\u677f\u5bff\u547d\u7b49\u65b9\u9762\u5b58\u5728\u77ed\u677f\u3002\u76ee\u524d\uff0cEUV\u5149\u523b\u673a\u7b49\u7cfb\u7edf\u590d\u6742\u5ea6\u3001\u6280\u672f\u74f6\u9888\u548c\u6210\u672c\u95ee\u9898\u7b49\u65e5\u76ca\u7a81\u51fa\uff0c\u7eb3\u7c73\u538b\u5370\u6280\u672f\u8fce\u6765\u66d9\u5149\uff0c\u5546\u4e1a\u5316\u8fdb\u7a0b\u660e\u663e\u52a0\u901f\u3002\u7eb3\u7c73\u538b\u5370\u6982\u5ff5\u975e\u5e38\u9ad8\u6df1\uff0c\u4f46\u5b9e\u9645\u4e0a\u5b83\u5728\u82af\u7247\u9886\u57df\u7684\u5e94\u7528\u539f\u7406\u5e76\u4e0d\u96be\u7406\u89e3\u3002\u7eb3\u7c73\u538b\u5370\u5149\u523b\u9020\u82af\u7247\u5c31\u50cf\u76d6\u7ae0\u4e00\u6837\uff0c\u628a\u6805\u6781\u957f\u5ea6\u53ea\u6709\u51e0\u7eb3\u7c73\u7684\u7535\u8def\u523b\u5728\u5370\u7ae0\u4e0a\uff0c\u518d\u5c06\u5370\u7ae0\u76d6\u5728\u6a61\u76ae\u6ce5\u4e0a\uff0c\u5f97\u5230\u4e0e\u5370\u7ae0\u76f8\u53cd\u7684\u56fe\u6848\uff0c\u7ecf\u8fc7\u8131\u6a21\u5c31\u80fd\u591f\u5f97\u5230\u4e00\u9897\u82af\u7247\u3002\u5728\u884c\u4e1a\u4e2d\uff0c\u8fd9\u4e2a\u7ae0\u88ab\u79f0\u4e3a\u6a21\u677f\uff0c\u800c\u6a61\u76ae\u6ce5\u5219\u88ab\u79f0\u4e3a\u7eb3\u7c73\u538b\u5370\u80f6\u3002\u4ee5\u7d2b\u5916\u56fa\u5316\u538b\u5370\u4e3a\u4f8b\uff0c\u5176\u9020\u82af\u7247\u6d41\u7a0b\u4e0e\u5149\u5b66\u5149\u523b\u6d41\u7a0b\u5982\u4e0b\u56fe\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" loading=\"lazy\" decoding=\"async\" width=\"640\" height=\"380\" src=\"https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/image-1.png\" alt=\"\" class=\"wp-image-6385\" srcset=\"https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/image-1.png 640w, https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/image-1-300x178.png 300w\" sizes=\"auto, (max-width: 640px) 100vw, 640px\" \/><\/figure>\n<\/div>\n\n\n<p>\u5728\u82af\u7247\u9886\u57df\uff0c\u7eb3\u7c73\u538b\u5370\u5149\u523b\u4e0d\u4ec5\u64c5\u957f\u5236\u9020\u5404\u79cd\u96c6\u6210\u7535\u8def\uff0c\u66f4\u64c5\u957f\u5236\u90203D NAND\u3001DRAM\u7b49<span class=\"wpcom_keyword_link\"><a href=\"https:\/\/vcai.cn\/index.php\/zhuti20230330-cunchu\/\" title=\"\u5b58\u50a8\u82af\u7247\">\u5b58\u50a8\u82af\u7247<\/a><\/span>\uff0c\u4e0e\u5fae\u5904\u7406\u5668\u7b49\u903b\u8f91\u7535\u8def\u76f8\u6bd4\uff0c\u5b58\u50a8\u5236\u9020\u5546\u5177\u6709\u4e25\u683c\u7684\u6210\u672c\u9650\u5236\uff0c\u4e14\u5bf9\u7f3a\u9677\u8981\u6c42\u653e\u5bbd\uff0c\u7eb3\u7c73\u538b\u5370\u5149\u523b\u6280\u672f\u4e0e\u4e4b\u975e\u5e38\u5951\u5408\u3002\u4e0eEUV\u76f8\u6bd4\uff0c\u7eb3\u7c73\u538b\u5370\u6280\u672f\u5f62\u6210\u56fe\u6848\u7684\u81ea\u7531\u5ea6\u8f83\u4f4e\uff0c\u56e0\u6b64\u9884\u8ba1\u5c06\u4f18\u5148\u7528\u4e8e\u751f\u4ea7\u7ef4\u6301\u4e00\u5b9a\u56fe\u6848\u7684NAND\u578b\u95ea\u5b58\u3002\u5982\u679c\u7eb3\u7c73\u538b\u5370\u8bbe\u5907\u5b9e\u73b0\u5546\u7528\u5316\uff0c\u4ee5SK\u6d77\u529b\u58eb\u4e3a\u9996\u7684NAND\u95ea\u5b58\u4f01\u4e1a\u5c06\u80fd\u591f\u63d0\u9ad8\u4ece200\u5c42\u5f00\u59cb\u7684\u5de5\u5e8f\u96be\u5ea6\u8d8a\u6765\u8d8a\u9ad8\u76843D NAND\u95ea\u5b58\u9886\u57df\u7684\u751f\u4ea7\u6548\u7387\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"320\" src=\"https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/image-3-1024x320.png\" alt=\"\" class=\"wp-image-6389\" srcset=\"https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/image-3-1024x320.png 1024w, https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/image-3-300x94.png 300w, https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/image-3-768x240.png 768w, https:\/\/vcai.cn\/wp-content\/uploads\/2023\/05\/image-3.png 1173w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>\u5728\u82af\u7247\u9886\u57df\uff0c\u7eb3\u7c73\u538b\u5370\u5c1a\u5904\u4e8e\u4ea7\u4e1a\u5316\u521d\u671f\u9636\u6bb5\uff0c\u5728\u826f\u54c1\u63a7\u5236\u3001\u6a21\u677f\u5bff\u547d\u7b49\u65b9\u9762\u5b58\u5728\u77ed\u677f\u3002\u76ee\u524d\uff0cEUV\u5149\u523b\u673a\u7b49\u7cfb\u7edf\u590d\u6742\u5ea6\u3001\u6280\u672f\u74f6\u9888\u548c\u6210\u672c\u95ee\u9898\u7b49\u65e5\u76ca\u7a81\u51fa\uff0c\u7eb3\u7c73\u538b\u5370\u6280\u672f\u8fce\u6765\u66d9\u5149\uff0c\u5546\u4e1a\u5316\u8fdb\u7a0b\u660e\u663e\u52a0\u901f\uff0c\u4f73\u80fd\u7b49\u534a\u5bfc\u4f53\u8bbe\u5907\u5236\u9020\u5546\u3001\u6750\u6599\u5546\u4ee5\u53ca\u5de5\u827a\u5546\u7eb7\u7eb7\u5f00\u59cb\u6d89\u8db3\u8fd9\u4e00\u9886\u57df\u3002\u968f\u7740\u76f8\u5173\u9886\u57df\u6280\u672f\u7684\u53d1\u5c55\uff0c\u7eb3\u7c73\u538b\u5370\u671b\u5728\u90e8\u5206\u9886\u57df\u5b9e\u73b0\u5bf9\u5149\u523b\u73af\u8282\u7684\u66ff\u4ee3\u3002TechNavio\u6570\u636e\u663e\u793a\uff0c2026\u5e74\u7eb3\u7c73\u538b\u5370\u5e02\u573a\u6709\u671b\u8fbe\u523033\u4ebf\u7f8e\u5143\uff0c2021\u5e74\u81f32026\u5e74\u5e74\u590d\u5408\u589e\u957f\u7387\u53ef\u8fbe17.74%\u3002<\/p>\n\n\n\n<h3 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